Semiconductor wafer vaccum heaters

THERMOCOAX  Group designs and manufactures thermal solutions which help to improve the uptime and process stability of semiconductor wafer process equipments. Our advanced heating applications are suitable for vacuum deposition environement ALD-CVD-PVD processes.
We also provide custom mineral cable heaters with the wattage required to get optimal temperature uniformity and process tunability.

Learn more about our semiconductor products, below :


SEMICON - radiative plate

SEMICON-heating plate-

SEMICON - chuck