Electronic and Semiconductor industries
Customized hot plates

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High temperature: up to 1000°C
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Fast heat up ramps
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Possibilities of several independent controlled zones
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Heaters press fit into the groove, vacuum brazed into the plate according to specifications
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Thermocouples for accurate measurement, control and regulation
Dedicated products and applications
Small heating oven
Burning in of the silver coating of halogen lamps by radiation heating.
Thermocouple flange
Build for a degas station utilizing arrangement of multiple stacked hot plates.
Ion source
For ion implantation - surface treatment using an ion beam that modifies the physico-chemical properties of surfaces.
Reactor tube
Heated reactor tube for analyser systems used in homogeneous and heterogeneous catalysis research.
10-zone oven
Used for a fluorescent lamp dring process.