Electronic and Semiconductor industries

Customized hot plates

• Suitable for Ultra-High-Vacuum applications

• High temperature: up to 1000°C

• Fast heat up ramps

• Possibilities of several independent controlled zones

• Heaters press fit into the groove, vacuum brazed into the plate according to specifications

• Thermocouples for accurate measurement, control and regulation

Dedicated products and applications

Small heating oven

Burning in of the silver coating of halogen lamps by radiation heating.

Thermocouple flange

Build for a degas station utilizing arrangement of multiple stacked hot plates.

Ion source

For ion implantation - surface treatment using an ion beam that modifies the physico-chemical properties of surfaces.

Reactor tube

Heated reactor tube for analyser systems used in homogeneous and heterogeneous catalysis research.

10-zone oven

Used for a fluorescent lamp dring process.

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